Inventor
JACKSON MICHAEL S
US10 patents
⚠️ This page may combine multiple inventors who share the name “JACKSON MICHAEL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6057244AMay 2, 2000
Method for improved sputter etch processing
APPLIED MATERIALS INC68 citations93
US7705275B2Apr 27, 2010
Substrate support having brazed plates and resistance heater
APPLIED MATERIALS INC25 citations86
US10643840B2May 5, 2020
Selective deposition defects removal by chemical etch
APPLIED MATERIALS INC2 citations70
US11735420B2Aug 22, 2023
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC0 citations62
US11515155B2Nov 29, 2022
Methods for enhancing selectivity in SAM-based selective deposition
APPLIED MATERIALS INC0 citations62
US11033930B2Jun 15, 2021
Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition
APPLIED MATERIALS INC0 citations62
US10950433B2Mar 16, 2021
Methods for enhancing selectivity in SAM-based selective deposition
APPLIED MATERIALS INC1 citations62
US10770292B2Sep 8, 2020
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC1 citations62
US10593521B2Mar 17, 2020
Substrate support for plasma etch operations
APPLIED MATERIALS INC0 citations44