Inventor
GHANAYEM STEVE
US16 patents
Patents
16 patentsUS6677247B2Jan 13, 2004
Method of increasing the etch selectivity of a contact sidewall to a preclean etchant
APPLIED MATERIALS INC116 citations98
US6309713B1Oct 30, 2001
Deposition of tungsten nitride by plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC89 citations98
US6156382ADec 5, 2000
Chemical vapor deposition process for depositing tungsten
APPLIED MATERIALS INC171 citations97
US5985033ANov 16, 1999
Apparatus and method for delivering a gas
APPLIED MATERIALS INC57 citations96
US6328808B1Dec 11, 2001
Apparatus and method for aligning and controlling edge deposition on a substrate
APPLIED MATERIALS INC44 citations95
US5328722AJul 12, 1994
Metal chemical vapor deposition process using a shadow ring
APPLIED MATERIALS INC149 citations94
US6271129B1Aug 7, 2001
Method for forming a gap filling refractory metal layer having reduced stress
APPLIED MATERIALS INC21 citations92
US6248176B1Jun 19, 2001
Apparatus and method for delivering a gas
APPLIED MATERIALS INC28 citations92
US6186092B1Feb 13, 2001
Apparatus and method for aligning and controlling edge deposition on a substrate
APPLIED MATERIALS INC39 citations92
US7192486B2Mar 20, 2007
Clog-resistant gas delivery system
APPLIED MATERIALS INC15 citations83
US6204174B1Mar 20, 2001
Method for high rate deposition of tungsten
APPLIED MATERIALS INC16 citations81
US6174373B1Jan 16, 2001
Non-plasma halogenated gas flow prevent metal residues
APPLIED MATERIALS INC7 citations74
US6070599AJun 6, 2000
Non-plasma halogenated gas flow to prevent metal residues
APPLIED MATERIALS INC10 citations74
US5709772AJan 20, 1998
Non-plasma halogenated gas flow to prevent metal residues
APPLIED MATERIALS INC2 citations63
US7745309B2Jun 29, 2010
Methods for surface activation by plasma immersion ion implantation process utilized in silicon-on-insulator structure
APPLIED MATERIALS INC5 citations61
US6210483B1Apr 3, 2001
Anti-notch thinning heater
APPLIED MATERIALS INC3 citations57