Inventor

FUKUTOME SHUICHIRO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “FUKUTOME SHUICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

2 patents

US7589335B2Sep 15, 2009

Charged-particle beam pattern writing method and apparatus and software program for use therein

NUFLARE TECHNOLOGY INC12 citations80

US9431208B2Aug 30, 2016

Charged-particle beam drawing apparatus and vibration damping mechanism

NUFLARE TECHNOLOGY INC1 citations47

TAMAMUSHI SHUICHI

1 patent

US8277603B2Oct 2, 2012

Move mechanism for moving target object and charged particle beam writing apparatus

TAMAMUSHI SHUICHI11 citations81

TOSHIBA KK

1 patent

US6676289B2Jan 13, 2004

Temperature measuring method in pattern drawing apparatus

TOSHIBA KK10 citations73