Inventor
LAN KAI-WEI
US7 patents
⚠️ This page may combine multiple inventors who share the name “LAN KAI-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOYOTA ENG & MFG NORTH AMERICA
4 patentsUS11914304B2Feb 27, 2024
Controlling porosity of an interference lithography process by fine tuning exposure time
TOYOTA ENG & MFG NORTH AMERICA2 citations70
US11726236B2Aug 15, 2023
Graded pore structure without phase mask
TOYOTA ENG & MFG NORTH AMERICA0 citations60
US11815822B2Nov 14, 2023
Electrodeposition compatible anti-reflection coatings for laser interference lithography applications
TOYOTA ENG & MFG NORTH AMERICA0 citations59
US11920252B2Mar 5, 2024
SU-8 etching technique using molten salt
TOYOTA ENG & MFG NORTH AMERICA0 citations49