Inventor
ARAKELYAN SHANT
KR3 patents
Patents
3 patentsUS11587770B2Feb 21, 2023
Apparatus and method for treating substrate
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US11869749B2Jan 9, 2024
Substrate processing apparatus and method of manufacturing thereof
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US12125682B2Oct 22, 2024
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations43