Inventor · disambiguated record
Nobuyoshi Deguchi
Also filed as: DEGUCHI NOBUYOSHI
5 granted patents·166 citations·filing 1985–2001
82Inventor score
Files withCANON KK5
Top patents by PatentIndex Score
5 records- 0187US6638672B2Exposure apparatus, coating/developing apparatus, method of transferring a substrate, method of producing a device, semiconductor production factory, and method of maintaining an exposure apparatusCANON KK·Filed 2001·Granted Oct 28, 2003·54 cites·52 claims
- 0280US6493062B2Driving apparatus and exposure apparatusCANON KK·Filed 1999·Granted Dec 10, 2002·61 cites·57 claims
- 0379US6608666B2Reference plate, exposure apparatus, device manufacturing system, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance methodCANON KK·Filed 2001·Granted Aug 19, 2003·18 cites·17 claims
- 0465US4747608AWafer chuckCANON KK·Filed 1985·Granted May 31, 1988·33 cites·8 claims
- 0528US6856404B2Scanning exposure method and apparatus, and device manufacturing method using the sameCANON KK·Filed 1999·Granted Feb 15, 2005·0 cites·10 claims
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