Inventor
IMAI SHUNZO
JP8 patents
Patents
8 patentsUS5463497AOct 31, 1995
Illumination device including an optical integrator defining a plurality of secondary light sources and related method
CANON KK166 citations98
US5153773AOct 6, 1992
Illumination device including amplitude-division and beam movements
CANON KK214 citations98
US4789294ADec 6, 1988
Wafer handling apparatus and method
CANON KK593 citations98
US6304005B1Oct 16, 2001
Power supply apparatus and method, and fabrication apparatus
CANON KK50 citations92
US4758127AJul 19, 1988
Original feeding apparatus and a cassette for containing the original
CANON KK48 citations92
US4747608AMay 31, 1988
Wafer chuck
CANON KK33 citations91
US6456364B1Sep 24, 2002
Semiconductor manufacturing apparatus, and device manufacturing method
CANON KK18 citations83
US4630922ADec 23, 1986
Pattern transfer apparatus
CANON KK7 citations72