Inventor
TYBERG CRISTY SENSENICH
US5 patents
Patents
5 patentsUS6677680B2Jan 13, 2004
Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials
IBM54 citations96
US6603204B2Aug 5, 2003
Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics
IBM54 citations96
US6831366B2Dec 14, 2004
Interconnects containing first and second porous low-k dielectrics separated by a porous buried etch stop layer
IBM19 citations92
US6716742B2Apr 6, 2004
Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics
IBM24 citations92
US6710450B2Mar 23, 2004
Interconnect structure with precise conductor resistance and method to form same
IBM11 citations73