Inventor
FRANKEL JONATHAN S
US5 patents
Patents
5 patentsUS6464799B1Oct 15, 2002
Method for managing a fluid level associated with a substrate processing tank
APPLIED MATERIALS INC30 citations92
US7063455B2Jun 20, 2006
Chemical dilution system for semiconductor device processing system
APPLIED MATERIALS INC12 citations78
US6957749B2Oct 25, 2005
Liquid delivery system
APPLIED MATERIALS INC10 citations72
US7364349B2Apr 29, 2008
Chemical dilution system for semiconductor device processing system
APPLIED MATERIALS INC7 citations70
US9859135B2Jan 2, 2018
Substrate rinsing systems and methods
APPLIED MATERIALS INC0 citations38