Inventor
MANDAL ROBERT R
US5 patents
Patents
5 patentsUS6537929B1Mar 25, 2003
CVD plasma assisted low dielectric constant films
APPLIED MATERIALS INC118 citations98
US6287990B1Sep 11, 2001
CVD plasma assisted low dielectric constant films
APPLIED MATERIALS INC233 citations98
US6800571B2Oct 5, 2004
CVD plasma assisted low dielectric constant films
APPLIED MATERIALS INC54 citations95
US6660663B1Dec 9, 2003
Computer readable medium for holding a program for performing plasma-assisted CVD of low dielectric constant films formed from organosilane compounds
APPLIED MATERIALS INC62 citations95
US7205249B2Apr 17, 2007
CVD plasma assisted low dielectric constant films
APPLIED MATERIALS INC32 citations92