Inventor
LAI JUN-YANG
TW3 patents
Patents
3 patentsUS6444541B1Sep 3, 2002
Method for forming lining oxide in shallow trench isolation incorporating pre-annealing step
TAIWAN SEMICONDUCTOR MFG23 citations89
US6702900B2Mar 9, 2004
Wafer chuck for producing an inert gas blanket and method for using
TAIWAN SEMICONDUCTOR MFG26 citations88
US6479402B1Nov 12, 2002
Method to improve adhesion of molding compound by providing an oxygen rich film over the top surface of a passivation layer
TAIWAN SEMICONDUCTOR MFG10 citations68