Inventor
HOU LI
US16 patents
⚠️ This page may combine multiple inventors who share the name “HOU LI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6942753B2Sep 13, 2005
Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC810 citations98
US10262837B2Apr 16, 2019
Plasma uniformity control by gas diffuser hole design
APPLIED MATERIALS INC5 citations84
US7501161B2Mar 10, 2009
Methods and apparatus for reducing arcing during plasma processing
APPLIED MATERIALS INC13 citations80
US10312058B2Jun 4, 2019
Plasma uniformity control by gas diffuser hole design
APPLIED MATERIALS INC3 citations73