Inventor
KING MACKENZIE E
US12 patents
⚠️ This page may combine multiple inventors who share the name “KING MACKENZIE E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
9 patentsUS7475588B2Jan 13, 2009
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS474 citations98
US7296460B2Nov 20, 2007
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS481 citations98
US7080545B2Jul 25, 2006
Apparatus and process for sensing fluoro species in semiconductor processing systems
ADVANCED TECH MATERIALS495 citations98
US6295861B1Oct 2, 2001
Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
ADVANCED TECH MATERIALS106 citations97
US7427344B2Sep 23, 2008
Methods for determining organic component concentrations in an electrolytic solution
ADVANCED TECH MATERIALS4 citations61
US7435320B2Oct 14, 2008
Methods and apparatuses for monitoring organic additives in electrochemical deposition solutions
ADVANCED TECH MATERIALS5 citations60
US7157051B2Jan 2, 2007
Sampling management for a process analysis tool to minimize sample usage and decrease sampling time
ADVANCED TECH MATERIALS5 citations55
US7141156B2Nov 28, 2006
One-point recalibration method for reducing error in concentration measurements for an electrolytic solution
ADVANCED TECH MATERIALS1 citations49
US6844196B2Jan 18, 2005
Analysis of antioxidant in solder plating solutions using molybdenum dichloride dioxide
ADVANCED TECH MATERIALS1 citations45