Inventor
ASANO TAKANOBU
JP18 patents
⚠️ This page may combine multiple inventors who share the name “ASANO TAKANOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL SAGAMI LTD
11 patentsUS5183378AFeb 2, 1993
Wafer counter having device for aligning wafers
TEL SAGAMI LTD85 citations96
US5125784AJun 30, 1992
Wafers transfer device
TEL SAGAMI LTD116 citations96
US5055036AOct 8, 1991
Method of loading and unloading wafer boat
TEL SAGAMI LTD111 citations96
US5007788AApr 16, 1991
Pitch changing device for changing pitches of plate-like objects and method of changing pitches
TEL SAGAMI LTD74 citations96
US5261935ANov 16, 1993
Clean air apparatus
TEL SAGAMI LTD112 citations95
US5110248AMay 5, 1992
Vertical heat-treatment apparatus having a wafer transfer mechanism
TEL SAGAMI LTD90 citations94
US5423503AJun 13, 1995
Plate-like member conveying apparatus
TEL SAGAMI LTD24 citations93
US5131799AJul 21, 1992
Semiconductor wafer transferring apparatus and boat for thermal treatment of a semiconductor wafer
TEL SAGAMI LTD32 citations92
US5030057AJul 9, 1991
Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer
TEL SAGAMI LTD41 citations90
US4938655AJul 3, 1990
Wafer transfer method
TEL SAGAMI LTD20 citations82
US5236181AAug 17, 1993
Vertical heat treating apparatus
TEL SAGAMI LTD15 citations74
TOKYO ELECTRON LTD
5 patentsUS5829939ANov 3, 1998
Treatment apparatus
TOKYO ELECTRON LTD139 citations98
US5562383AOct 8, 1996
Treatment apparatus
TOKYO ELECTRON LTD572 citations98
US6863732B2Mar 8, 2005
Heat treatment system and method
TOKYO ELECTRON LTD24 citations92
US6540509B2Apr 1, 2003
Heat treatment system and method
TOKYO ELECTRON LTD31 citations92
US5533243AJul 9, 1996
Notch position aligning apparatus and process for using the apparatus to independently align individual wafers in a wafer cassette
TOKYO ELECTRON LTD51 citations92