Inventor
KAMATA SHIGETO
JP19 patents
⚠️ This page may combine multiple inventors who share the name “KAMATA SHIGETO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
18 patentsUS6084319AJul 4, 2000
Linear motor, and stage device and exposure apparatus provided with the same
CANON KK125 citations97
US6741087B2May 25, 2004
Voltage-applying probe, apparatus for manufacturing electron source using the probe, and method for manufacturing electron source using the apparatus
CANON KK25 citations92
US6639333B1Oct 28, 2003
Linear motor stage system for use in exposure apparatus
CANON KK23 citations92
US6043572AMar 28, 2000
Linear motor, stage device, and exposing device
CANON KK35 citations92
US6025658AFeb 15, 2000
Linear motor, and stage apparatus and exposure apparatus using the same
CANON KK22 citations92
US5703420ADec 30, 1997
Moving magnet type multi-phase linear motor with vibration suppression and coil cooling means
CANON KK20 citations92
US5701041ADec 23, 1997
Weight supporting apparatus
CANON KK40 citations92
US7972461B2Jul 5, 2011
Hermetically sealed container and manufacturing method of image forming apparatus using the same
CANON KK9 citations84
US7110665B2Sep 19, 2006
Thermal treatment equipment, thermal treatment method and manufacturing method of image display apparatus
CANON KK13 citations84
US7039303B2May 2, 2006
Heating method, heating apparatus, and production method of image display apparatus
CANON KK14 citations84
US7383875B2Jun 10, 2008
Heating/cooling method, manufacturing method of image displaying apparatus, heating/cooling apparatus, and heating/cooling processing apparatus
CANON KK9 citations82
US6962516B2Nov 8, 2005
Voltage applying apparatus, and apparatus and method for manufacturing electron source
CANON KK9 citations73
US6347535B2Feb 19, 2002
Heating apparatus and method
CANON KK12 citations73
US7126087B2Oct 24, 2006
Method of effecting heating and cooling in reduced pressure atmosphere
CANON KK6 citations63
US6937041B2Aug 30, 2005
Method for manufacturing a substrate and a display device
CANON KK3 citations63
US7226331B2Jun 5, 2007
Electron source manufacturing apparatus and electron source manufacturing method
CANON KK4 citations61
US7972191B2Jul 5, 2011
Manufacturing method of image display apparatus
CANON KK0 citations52
US7445535B2Nov 4, 2008
Electron source producing apparatus and method
CANON KK0 citations48