Inventor
TAKATSU KAZUMASA
JP4 patents
Patents
4 patentsUS7226331B2Jun 5, 2007
Electron source manufacturing apparatus and electron source manufacturing method
CANON KK4 citations61
US5700326ADec 23, 1997
Microwave plasma processing apparatus
CANON KK4 citations61
US7828623B2Nov 9, 2010
Apparatus for processing substrate and apparatus for processing electron source substrate
CANON KK2 citations56
US7445535B2Nov 4, 2008
Electron source producing apparatus and method
CANON KK0 citations48