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Inventor
MATERNA VOLKER
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “MATERNA VOLKER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV LELAND STANFORD JUNIOR
1 patent
US7319372B2
Jan 15, 2008
In-plane mechanically coupled microelectromechanical tuning fork resonators
UNIV LELAND STANFORD JUNIOR
15 citations
81
GUENTHER SEBASTIAN
1 patent
US8207500B2
Jun 26, 2012
Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same
GUENTHER SEBASTIAN
0 citations
39