Inventor
TSAI SHANG-TING
TW7 patents
⚠️ This page may combine multiple inventors who share the name “TSAI SHANG-TING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6746966B1Jun 8, 2004
Method to solve alignment mark blinded issues and a technology for application of semiconductor etching at a tiny area
TAIWAN SEMICONDUCTOR MFG4 citations62
US7125521B2Oct 24, 2006
Method to solve alignment mark blinded issues and technology for application of semiconductor etching at a tiny area
TAIWAN SEMICONDUCTOR MFG0 citations50
US6884149B2Apr 26, 2005
Method and system for in-situ monitoring of mixing ratio of high selectivity slurry
TAIWAN SEMICONDUCTOR MFG0 citations50
US6729935B2May 4, 2004
Method and system for in-situ monitoring of mixing ratio of high selectivity slurry
TAIWAN SEMICONDUCTOR MFG0 citations50