Inventor
CHEN YU-HUEI
TW6 patents
Patents
6 patentsUS6756321B2Jun 29, 2004
Method for forming a capping layer over a low-k dielectric with improved adhesion and reduced dielectric constant
TAIWAN SEMICONDUCTOR MFG49 citations91
US6706637B2Mar 16, 2004
Dual damascene aperture formation method absent intermediate etch stop layer
TAIWAN SEMICONDUCTOR MFG6 citations60
US6884149B2Apr 26, 2005
Method and system for in-situ monitoring of mixing ratio of high selectivity slurry
TAIWAN SEMICONDUCTOR MFG0 citations50
US6812167B2Nov 2, 2004
Method for improving adhesion between dielectric material layers
TAIWAN SEMICONDUCTOR MFG0 citations50
US6729935B2May 4, 2004
Method and system for in-situ monitoring of mixing ratio of high selectivity slurry
TAIWAN SEMICONDUCTOR MFG0 citations50
US7176135B2Feb 13, 2007
EBR shape of spin-on low-k material providing good film stacking
TAIWAN SEMICONDUCTOR MFG0 citations49