Inventor
LISCHKA DAVID J
US14 patents
⚠️ This page may combine multiple inventors who share the name “LISCHKA DAVID J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS7044832B2May 16, 2006
Load cup for chemical mechanical polishing
APPLIED MATERIALS INC61 citations94
US7998358B2Aug 16, 2011
Peak-based endpointing for chemical mechanical polishing
APPLIED MATERIALS INC14 citations92
US7621798B1Nov 24, 2009
Reducing polishing pad deformation
APPLIED MATERIALS INC19 citations92
US7210980B2May 1, 2007
Sealed polishing pad, system and methods
APPLIED MATERIALS INC20 citations92
US7112119B1Sep 26, 2006
Sealed polishing pad methods
APPLIED MATERIALS INC29 citations92
US7163437B1Jan 16, 2007
System with sealed polishing pad
APPLIED MATERIALS INC12 citations84
US6905399B2Jun 14, 2005
Conditioning mechanism for chemical mechanical polishing
APPLIED MATERIALS INC8 citations73
US9056383B2Jun 16, 2015
Path for probe of spectrographic metrology system
APPLIED MATERIALS INC3 citations63
US9799578B2Oct 24, 2017
Peak-based endpointing for chemical mechanical polishing
APPLIED MATERIALS INC0 citations52
US9564377B2Feb 7, 2017
Peak-based endpointing for chemical mechanical polishing
APPLIED MATERIALS INC0 citations52
US11919120B2Mar 5, 2024
Polishing system with contactless platen edge control
APPLIED MATERIALS INC0 citations48