Inventor
CARBONE CRAIG J
US6 patents
⚠️ This page may combine multiple inventors who share the name “CARBONE CRAIG J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
5 patentsUS8662812B2Mar 4, 2014
Load lock fast pump vent
BROOKS AUTOMATION INC13 citations82
US10854478B2Dec 1, 2020
Load lock fast pump vent
BROOKS AUTOMATION INC2 citations71
US11610787B2Mar 21, 2023
Load lock fast pump vent
BROOKS AUTOMATION INC0 citations61
US9478446B2Oct 25, 2016
Load lock chamber
BROOKS AUTOMATION INC2 citations61
US10541157B2Jan 21, 2020
Load lock fast pump vent
BROOKS AUTOMATION INC0 citations49