P

Inventor

FONG HO YIN OWEN

US7 patents
⚠️ This page may combine multiple inventors who share the name “FONG HO YIN OWEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BROOKS AUTOMATION INC

5 patents
US8662812B2Mar 4, 2014

Load lock fast pump vent

BROOKS AUTOMATION INC13 citations82
US10854478B2Dec 1, 2020

Load lock fast pump vent

BROOKS AUTOMATION INC2 citations71
US11610787B2Mar 21, 2023

Load lock fast pump vent

BROOKS AUTOMATION INC0 citations61
US9478446B2Oct 25, 2016

Load lock chamber

BROOKS AUTOMATION INC2 citations61
US10541157B2Jan 21, 2020

Load lock fast pump vent

BROOKS AUTOMATION INC0 citations49

HOFMEISTER CHRISTOPHER

1 patent
US8272825B2Sep 25, 2012

Load lock fast pump vent

HOFMEISTER CHRISTOPHER33 citations90

CHENG JEREMY

1 patent
US8882917B1Nov 11, 2014

Substrate processing including correction for deposition location

CHENG JEREMY9 citations79