Inventor
SUBRAMANI MANI
US6 patents
⚠️ This page may combine multiple inventors who share the name “SUBRAMANI MANI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6368469B1Apr 9, 2002
Coils for generating a plasma and for sputtering
APPLIED MATERIALS INC48 citations96
US6783639B2Aug 31, 2004
Coils for generating a plasma and for sputtering
APPLIED MATERIALS INC21 citations92
US6254737B1Jul 3, 2001
Active shield for generating a plasma for sputtering
APPLIED MATERIALS INC19 citations91
US11037764B2Jun 15, 2021
Modular microwave source with local Lorentz force
APPLIED MATERIALS INC4 citations72
US11721532B2Aug 8, 2023
Modular microwave source with local lorentz force
APPLIED MATERIALS INC0 citations62