Inventor
ROBERTS JAMES F
US5 patents
⚠️ This page may combine multiple inventors who share the name “ROBERTS JAMES F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS5326725AJul 5, 1994
Clamping ring and susceptor therefor
APPLIED MATERIALS INC166 citations98
US5421401AJun 6, 1995
Compound clamp ring for semiconductor wafers
APPLIED MATERIALS INC69 citations96
US5316278AMay 31, 1994
Clamping ring apparatus for processing semiconductor wafers
APPLIED MATERIALS INC29 citations90