Inventor

SCHERÜBL THOMAS

DE3 patents

⚠️ This page may combine multiple inventors who share the name “SCHERÜBL THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

POORTINGA ERIC

1 patent

US8913120B2Dec 16, 2014

Method for emulation of a photolithographic process and mask inspection microscope for performing the method

POORTINGA ERIC16 citations71

ZEISS CARL SMT GMBH

1 patent

US10055833B2Aug 21, 2018

Method and system for EUV mask blank buried defect analysis

ZEISS CARL SMT GMBH2 citations66

WAIBLINGER MARKUS

1 patent

US9431212B2Aug 30, 2016

Method for determining the performance of a photolithographic mask

WAIBLINGER MARKUS2 citations53