Inventor

RICHTER RIGO

DE3 patents

⚠️ This page may combine multiple inventors who share the name “RICHTER RIGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHERUEBL THOMAS

1 patent

US8730474B2May 20, 2014

Method and apparatus for measuring of masks for the photo-lithography

SCHERUEBL THOMAS7 citations78

POORTINGA ERIC

1 patent

US8913120B2Dec 16, 2014

Method for emulation of a photolithographic process and mask inspection microscope for performing the method

POORTINGA ERIC16 citations71

KIENZLE OLIVER

1 patent

US8264535B2Sep 11, 2012

Method and apparatus for analyzing a group of photolithographic masks

KIENZLE OLIVER0 citations27