Inventor

OMSTEAD THOMAS

US2 patents

⚠️ This page may combine multiple inventors who share the name “OMSTEAD THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US10436717B2Oct 8, 2019

Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process

TOKYO ELECTRON LTD7 citations78

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent

US9435038B2Sep 6, 2016

Ion implant assisted metal etching

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations48