Inventor

CHEN HUNG CHIH

US148 patents

⚠️ This page may combine multiple inventors who share the name “CHEN HUNG CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN HUNG CHIH

APPLIED MATERIALS INC

Multiple zone carrier head with flexible membrane

Multi-chamber carrier head with a flexible membrane

Carrier head for chemical mechanical polishing a substrate

Substrate retainer

Six headed carousel

Control of a multi-chamber carrier head

Carrier head with flexible membranes to provide controllable pressure and loading area

Carrier head with a substrate detector

Chemical mechanical polishing using magnetic force

Substrate retainer

Carrier head with a compressible film

Carrier head with pressurizable bladder

Carrier head with local pressure control for a chemical mechanical polishing apparatus

Carrier head to apply pressure to and retain a substrate

Carrier head with multi-part flexible membrane

Method and apparatus for chemical mechanical polishing using a patterned pad

Retaining ring with shaped surface

Load cup for chemical mechanical polishing

Determining when to replace a retaining ring used in substrate polishing operations

Substrate retainer

Flexible membrane for multi-chamber carrier head

Carrier head for thermal drift compensation

Substrate carrier with a textured membrane

Multi-chamber carrier head with a flexible membrane

Two part retaining ring

Carrier head with a non-stick membrane

Vibration damping in a chemical mechanical polishing system

Carrier head with local pressure control for a chemical mechanical polishing apparatus

Carrier head with pressure transfer mechanism

Retaining ring with shaped surface

Fast substrate loading on polishing head without membrane inflation step

Six headed carousel

Carrier head with multiple chambers

Composite retaining ring

Substrate removal from polishing tool

Profile control platen

Method of detecting a substrate in a carrier head

Carrier head with flexible membrane to provide controllable pressure and loading area

Methods for carrier head with multi-part flexible membrane

Monitoring retaining ring thickness and pressure control

CHEN HUNG CHIH

Carrier head with narrow inner ring and wide outer ring

Retaining ring with shaped surface

Multiple zone carrier head with flexible membrane

Retaining ring with shaped surface

WISTRON CORP

Fixing device for fixing a portable electronic device and portable electronic system therewith

Computer apparatus

KAVLICO CORP

High pressure capacitive transducer

CHANG SHOU-SUNG

Closed loop control of pad profile based on metrology feedback

TAIWAN SEMICONDUCTOR MFG

Liquid dispensing system and method for dispensing

HTC CORP

Keyboard