Inventor

OH JEONGHOON

US90 patents

⚠️ This page may combine multiple inventors who share the name “OH JEONGHOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OH JEONGHOON

APPLIED MATERIALS INC

Multiple zone carrier head with flexible membrane

Acoustic emission monitoring and endpoint for chemical mechanical polishing

Carrier head with retaining ring and carrier ring

Flexible membrane for carrier head

Flexible membrane for carrier head

Carrier ring for carrier head

Carrier head with retaining ring and carrier ring

Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly

Flexible membrane for multi-chamber carrier head

Two part retaining ring

Retaining ring having inner surfaces with facets

Retaining ring with shaped surface

Fast substrate loading on polishing head without membrane inflation step

Composite retaining ring

Retaining ring having inner surfaces with facets

Sputtering target with backside cooling grooves

Multi-chamber carrier head with a textured membrane

Retaining ring with shaped profile

Carrier ring for carrier head

Retaining ring with shaped surface

Retaining ring having inner surfaces with features

Retaining ring with Shaped Surface

Carrier head using flexure restraints for retaining ring alignment

Retaining ring design

Retaining ring having inner surfaces with facets

Retaining ring having inner surfaces with facets

Sputtering target with backside cooling grooves

Sputtering target with backside cooling grooves

Textured membrane for a multi-chamber carrier head

Polishing system with annular platen or polishing pad for substrate monitoring

Gas cooled substrate support for stabilized high temperature deposition

Configurable pressure design for multizone chemical mechanical planarization polishing head

Multiple zone carrier head with flexible membrane

Retaining ring having inner surfaces with features

Retaining ring having inner surfaces with features

Retaining ring with shaped surface

Retaining ring for CMP

Methods for the continuous processing of substrates

Temperature control of chemical mechanical polishing

Textured small pad for chemical mechanical polishing

CHEN HUNG CHIH

Retaining ring with shaped surface

Multiple zone carrier head with flexible membrane

Retaining ring with shaped surface

SAMSUNG ELECTRONICS CO LTD

Semiconductor device and method of fabricating the same

Semiconductor devices including channel dopant layer

ZUNIGA STEVEN M

Flexible membrane for carrier head

PRABHU GOPALAKRISHNA B

Retaining ring with shaped profile

YANG YAO-HUNG

Method and apparatus for substrate support with multi-zone heating

OH JEONGHOON

Multi-chamber carrier head with a textured membrane

WU BANQIU

Continuous substrate processing system