Inventor
ZUNIGA STEVEN M
US162 patents
⚠️ This page may combine multiple inventors who share the name “ZUNIGA STEVEN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
48 patentsUS6422927B1Jul 23, 2002
Carrier head with controllable pressure and loading area for chemical mechanical polishing
APPLIED MATERIALS INC109 citations99
US6251215B1Jun 26, 2001
Carrier head with a multilayer retaining ring for chemical mechanical polishing
APPLIED MATERIALS INC190 citations99
US6183354B1Feb 6, 2001
Carrier head with a flexible membrane for a chemical mechanical polishing system
APPLIED MATERIALS INC276 citations99
US6080050AJun 27, 2000
Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC125 citations99
US5762544AJun 9, 1998
Carrier head design for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC304 citations99
US7255771B2Aug 14, 2007
Multiple zone carrier head with flexible membrane
APPLIED MATERIALS INC82 citations98
US6890249B1May 10, 2005
Carrier head with edge load retaining ring
APPLIED MATERIALS INC69 citations98
US6872130B1Mar 29, 2005
Carrier head with non-contact retainer
APPLIED MATERIALS INC68 citations98
US6857945B1Feb 22, 2005
Multi-chamber carrier head with a flexible membrane
APPLIED MATERIALS INC116 citations98
US6210255B1Apr 3, 2001
Carrier head for chemical mechanical polishing a substrate
APPLIED MATERIALS INC114 citations98
US5993302ANov 30, 1999
Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC120 citations98
US5957751ASep 28, 1999
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
APPLIED MATERIALS INC147 citations98
US7459057B2Dec 2, 2008
Substrate retainer
APPLIED MATERIALS INC38 citations96
US6722965B2Apr 20, 2004
Carrier head with flexible membranes to provide controllable pressure and loading area
APPLIED MATERIALS INC66 citations96
US6436228B1Aug 20, 2002
Substrate retainer
APPLIED MATERIALS INC54 citations96
US6436828B1Aug 20, 2002
Chemical mechanical polishing using magnetic force
APPLIED MATERIALS INC60 citations96
US6431968B1Aug 13, 2002
Carrier head with a compressible film
APPLIED MATERIALS INC69 citations96
US6241593B1Jun 5, 2001
Carrier head with pressurizable bladder
APPLIED MATERIALS INC78 citations96
US6146259ANov 14, 2000
Carrier head with local pressure control for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC81 citations96
US6450868B1Sep 17, 2002
Carrier head with multi-part flexible membrane
APPLIED MATERIALS INC67 citations95
US7344434B2Mar 18, 2008
Retaining ring with shaped surface
APPLIED MATERIALS INC33 citations94
US6390908B1May 21, 2002
Determining when to replace a retaining ring used in substrate polishing operations
APPLIED MATERIALS INC77 citations94
US8029640B2Oct 4, 2011
Multilayer retaining ring for chemical mechanical polishing
APPLIED MATERIALS INC16 citations93
US8021215B2Sep 20, 2011
Carrier head with retaining ring and carrier ring
APPLIED MATERIALS INC19 citations93
US7950985B2May 31, 2011
Flexible membrane for carrier head
APPLIED MATERIALS INC27 citations93
US7883397B2Feb 8, 2011
Substrate retainer
APPLIED MATERIALS INC15 citations93
US7727055B2Jun 1, 2010
Flexible membrane for carrier head
APPLIED MATERIALS INC28 citations93
US7699688B2Apr 20, 2010
Carrier ring for carrier head
APPLIED MATERIALS INC26 citations93
US7654888B2Feb 2, 2010
Carrier head with retaining ring and carrier ring
APPLIED MATERIALS INC33 citations93
US7575504B2Aug 18, 2009
Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly
APPLIED MATERIALS INC41 citations93
US7534364B2May 19, 2009
Methods for a multilayer retaining ring
APPLIED MATERIALS INC11 citations93
US7520955B1Apr 21, 2009
Carrier head with a multilayer retaining ring for chemical mechanical polishing
APPLIED MATERIALS INC10 citations93
US7198561B2Apr 3, 2007
Flexible membrane for multi-chamber carrier head
APPLIED MATERIALS INC35 citations93
US7101272B2Sep 5, 2006
Carrier head for thermal drift compensation
APPLIED MATERIALS INC27 citations93
US7040971B2May 9, 2006
Carrier head with a flexible membrane
APPLIED MATERIALS INC13 citations93
US7001257B2Feb 21, 2006
Multi-chamber carrier head with a flexible membrane
APPLIED MATERIALS INC26 citations93
US6974371B2Dec 13, 2005
Two part retaining ring
APPLIED MATERIALS INC31 citations93
US6923714B1Aug 2, 2005
Carrier head with a non-stick membrane
APPLIED MATERIALS INC24 citations93
US6857946B2Feb 22, 2005
Carrier head with a flexure
APPLIED MATERIALS INC12 citations93
US6645044B2Nov 11, 2003
Method of chemical mechanical polishing with controllable pressure and loading area
APPLIED MATERIALS INC24 citations93
US6540594B2Apr 1, 2003
Carrier head with a flexible membrane for a chemical mechanical polishing system
APPLIED MATERIALS INC16 citations93
US6511367B2Jan 28, 2003
Carrier head with local pressure control for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC17 citations93
US6494774B1Dec 17, 2002
Carrier head with pressure transfer mechanism
APPLIED MATERIALS INC47 citations93
US6386955B2May 14, 2002
Carrier head with a flexible membrane for a chemical mechanical polishing system
APPLIED MATERIALS INC23 citations93
US6358121B1Mar 19, 2002
Carrier head with a flexible membrane and an edge load ring
APPLIED MATERIALS INC38 citations93
US6277009B1Aug 21, 2001
Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC33 citations93
US6244942B1Jun 12, 2001
Carrier head with a flexible membrane and adjustable edge pressure
APPLIED MATERIALS INC38 citations93
US9368371B2Jun 14, 2016
Retaining ring having inner surfaces with facets
APPLIED MATERIALS INC21 citations92
CHEN HUNG CHIH
1 patentZUNIGA STEVEN M
1 patentShowing the top 50 of 162 patents by PatentIndex Score.