Inventor
HUNG YUNG LONG
TW4 patents
Patents
4 patentsUS7504184B2Mar 17, 2009
Phase-shifting mask for equal line/space dense line patterns
NANYA TECHNOLOGY CORP109 citations95
US7504183B2Mar 17, 2009
Chromeless phase-shifting mask for equal line/space dense line patterns
NANYA TECHNOLOGY CORP2 citations58
US7052810B2May 30, 2006
Method of correcting optical proximity effect of contact holes
NANYA TECHNOLOGY CORP5 citations54
US6998226B2Feb 14, 2006
Method of forming patterned photoresist layer
NANYA TECHNOLOGY CORP0 citations49