Inventor
WANG YA CHIH
TW9 patents
⚠️ This page may combine multiple inventors who share the name “WANG YA CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANYA TECHNOLOGY CORP
6 patentsUS9530663B1Dec 27, 2016
Method for forming a pattern
NANYA TECHNOLOGY CORP18 citations82
US7811723B2Oct 12, 2010
Phase-shift mask and method for forming a pattern
NANYA TECHNOLOGY CORP0 citations49
US6998226B2Feb 14, 2006
Method of forming patterned photoresist layer
NANYA TECHNOLOGY CORP0 citations49
US8368869B2Feb 5, 2013
Lithography apparatus with an optical fiber module
NANYA TECHNOLOGY CORP0 citations46
US7799697B2Sep 21, 2010
Patterning method in semiconductor manufacturing process including an array of rectangular blocks and filling features
NANYA TECHNOLOGY CORP1 citations46
US9318412B2Apr 19, 2016
Method for semiconductor self-aligned patterning
NANYA TECHNOLOGY CORP0 citations38