Inventor
TIEN CHUN-CHIEH
TW4 patents
⚠️ This page may combine multiple inventors who share the name “TIEN CHUN-CHIEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS12411404B2Sep 9, 2025
Method of manufacturing phase shift photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11906898B2Feb 20, 2024
Method of manufacturing phase shift photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10739671B2Aug 11, 2020
Method of manufacturing phase shift photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48