Inventor
LEE KUAN-SHIEN
TW5 patents
Patents
5 patentsUS12087579B2Sep 10, 2024
Method for forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11036129B2Jun 15, 2021
Photomask and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12411404B2Sep 9, 2025
Method of manufacturing phase shift photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11906898B2Feb 20, 2024
Method of manufacturing phase shift photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10739671B2Aug 11, 2020
Method of manufacturing phase shift photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48