Inventor
KNOWLES DAVID S
US14 patents
⚠️ This page may combine multiple inventors who share the name “KNOWLES DAVID S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
10 patentsUS6625191B2Sep 23, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC236 citations98
US5991324ANov 23, 1999
Reliable. modular, production quality narrow-band KRF excimer laser
CYMER INC196 citations98
US7567607B2Jul 28, 2009
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC14 citations92
US6985508B2Jan 10, 2006
Very narrow band, two chamber, high reprate gas discharge laser system
CYMER INC29 citations92
US6801560B2Oct 5, 2004
Line selected F2 two chamber laser system
CYMER INC18 citations92
US7058107B2Jun 6, 2006
Line selected F2 two chamber laser system
CYMER INC5 citations74
US7061961B2Jun 13, 2006
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC5 citations73
US7218661B2May 15, 2007
Line selected F2 two chamber laser system
CYMER INC4 citations62
US7471455B2Dec 30, 2008
Systems and methods for generating laser light shaped as a line beam
CYMER INC6 citations59
US7679029B2Mar 16, 2010
Systems and methods to shape laser light as a line beam for interaction with a substrate having surface variations
CYMER INC0 citations51