Inventor
MYERS DAVID W
US18 patents
⚠️ This page may combine multiple inventors who share the name “MYERS DAVID W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
12 patentsUS6567450B2May 20, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC265 citations99
US6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US6625191B2Sep 23, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC236 citations98
US7164144B2Jan 16, 2007
EUV light source
CYMER INC113 citations97
US7317196B2Jan 8, 2008
LPP EUV light source
CYMER INC54 citations96
US7567607B2Jul 28, 2009
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC14 citations92
US6801560B2Oct 5, 2004
Line selected F2 two chamber laser system
CYMER INC18 citations92
US7323703B2Jan 29, 2008
EUV light source
CYMER INC10 citations84
US7058107B2Jun 6, 2006
Line selected F2 two chamber laser system
CYMER INC5 citations74
US7061961B2Jun 13, 2006
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC5 citations73
US7218661B2May 15, 2007
Line selected F2 two chamber laser system
CYMER INC4 citations62
US7141806B1Nov 28, 2006
EUV light source collector erosion mitigation
CYMER INC5 citations62