Inventor
WANG ERHENG
US5 patents
Patents
5 patentsUS12354891B2Jul 8, 2025
Particle beam inspection apparatus
ASML NETHERLANDS BV0 citations59
US11942340B2Mar 26, 2024
Particle beam inspection apparatus
ASML NETHERLANDS BV0 citations59
US11430678B2Aug 30, 2022
Particle beam inspection apparatus
ASML NETHERLANDS BV0 citations59
US12249480B2Mar 11, 2025
Fluid transfer system in a charged particle system
ASML NETHERLANDS BV0 citations56
US11996262B2May 28, 2024
Fluid transfer system in a charged particle system
ASML NETHERLANDS BV0 citations56