Inventor
ANDERSON STUART L
US15 patents
⚠️ This page may combine multiple inventors who share the name “ANDERSON STUART L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
14 patentsUS6567450B2May 20, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC265 citations99
US6625191B2Sep 23, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC236 citations98
USRE40343EMay 27, 2008
Control circuit with automatic DC offset
CYMER INC55 citations97
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6532247B2Mar 11, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC79 citations97
US6442181B1Aug 27, 2002
Extreme repetition rate gas discharge laser
CYMER INC56 citations95
US6618421B2Sep 9, 2003
High repetition rate gas discharge laser with precise pulse timing control
CYMER INC59 citations93
US7567607B2Jul 28, 2009
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC14 citations92
US6985508B2Jan 10, 2006
Very narrow band, two chamber, high reprate gas discharge laser system
CYMER INC29 citations92
US6282218B1Aug 28, 2001
Control circuit with automatic DC offset
CYMER INC28 citations92
US5867514AFeb 2, 1999
Laser wavelength control circuit having automatic DC offset and gain adjustment
CYMER INC26 citations92
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US7061961B2Jun 13, 2006
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC5 citations73
US7149234B2Dec 12, 2006
High repetition rate gas discharge laser with precise pulse timing control
CYMER INC1 citations49