Inventor
UJAZDOWSKI RICHARD C
US40 patents
⚠️ This page may combine multiple inventors who share the name “UJAZDOWSKI RICHARD C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
32 patentsUS6567450B2May 20, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC265 citations99
US6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US6625191B2Sep 23, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC236 citations98
US5991324ANov 23, 1999
Reliable. modular, production quality narrow-band KRF excimer laser
CYMER INC196 citations98
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6414979B2Jul 2, 2002
Gas discharge laser with blade-dielectric electrode
CYMER INC173 citations97
US6317447B1Nov 13, 2001
Electric discharge laser with acoustic chirp correction
CYMER INC108 citations97
US6212211B1Apr 3, 2001
Shock wave dissipating laser chamber
CYMER INC113 citations95
US6034978AMar 7, 2000
Gas discharge laser with gas temperature control
CYMER INC70 citations95
US5978405ANov 2, 1999
Laser chamber with minimized acoustic and shock wave disturbances
CYMER INC68 citations95
US7567607B2Jul 28, 2009
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC14 citations92
US6985508B2Jan 10, 2006
Very narrow band, two chamber, high reprate gas discharge laser system
CYMER INC29 citations92
US6914919B2Jul 5, 2005
Six to ten KHz, or greater gas discharge laser system
CYMER INC34 citations92
US6801560B2Oct 5, 2004
Line selected F2 two chamber laser system
CYMER INC18 citations92
US5848089ADec 8, 1998
Excimer laser with magnetic bearings supporting fan
CYMER INC51 citations92
US7856044B2Dec 21, 2010
Extendable electrode for gas discharge laser
CYMER INC15 citations91
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US6654403B2Nov 25, 2003
Flow shaping electrode with erosion pad for gas discharge laser
CYMER INC16 citations84
US6034984AMar 7, 2000
Tangential fan with cutoff assembly and vibration control for electric discharge laser
CYMER INC17 citations84
US6690706B2Feb 10, 2004
High rep-rate laser with improved electrodes
CYMER INC17 citations83
US7522650B2Apr 21, 2009
Gas discharge laser chamber improvements
CYMER INC8 citations82
US7058107B2Jun 6, 2006
Line selected F2 two chamber laser system
CYMER INC5 citations74
US7542502B2Jun 2, 2009
Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
CYMER INC7 citations73
US7061961B2Jun 13, 2006
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC5 citations73
US6023486AFeb 8, 2000
Soldered fan assembly for electric discharge laser
CYMER INC13 citations73
US6937635B2Aug 30, 2005
High rep-rate laser with improved electrodes
CYMER INC7 citations71
US6661826B2Dec 9, 2003
Laser chamber insulator with sealed electrode feedthrough
CYMER INC11 citations70
US7633989B2Dec 15, 2009
High pulse repetition rate gas discharge laser
CYMER INC2 citations63
US6144686ANov 7, 2000
Tangential fan with cutoff assembly and vibration control for electric discharge laser
CYMER INC6 citations63
US7218661B2May 15, 2007
Line selected F2 two chamber laser system
CYMER INC4 citations62
US7301980B2Nov 27, 2007
Halogen gas discharge laser electrodes
CYMER INC5 citations61
US7132123B2Nov 7, 2006
High rep-rate laser with improved electrodes
CYMER INC3 citations60