Inventor
SMITH SCOT T
US6 patents
⚠️ This page may combine multiple inventors who share the name “SMITH SCOT T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
5 patentsUS6928093B2Aug 9, 2005
Long delay and high TIS pulse stretcher
CYMER INC81 citations95
US7567607B2Jul 28, 2009
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC14 citations92
US7369597B2May 6, 2008
Laser output light pulse stretcher
CYMER INC41 citations91
US7061961B2Jun 13, 2006
Very narrow band, two chamber, high rep-rate gas discharge laser system
CYMER INC5 citations73
US7218661B2May 15, 2007
Line selected F2 two chamber laser system
CYMER INC4 citations62