Inventor

ISMAIL AMIR BIN

NL3 patents

Patents

3 patents

US11022896B2Jun 1, 2021

Mark position determination method

ASML NETHERLANDS BV3 citations68

US12085913B2Sep 10, 2024

Method for generating a control scheme and device manufacturing method

ASML NETHERLANDS BV0 citations58

US12276919B2Apr 15, 2025

Method for controlling a semiconductor manufacturing process

ASML NETHERLANDS BV0 citations44