Inventor
RAHMAN RIZVI
NL7 patents
Patents
7 patentsUS11774862B2Oct 3, 2023
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV4 citations72
US11175591B2Nov 16, 2021
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV2 citations70
US12078935B2Sep 3, 2024
Device manufacturing methods
ASML NETHERLANDS BV0 citations60
US11442366B2Sep 13, 2022
Device manufacturing methods
ASML NETHERLANDS BV0 citations60
US12085913B2Sep 10, 2024
Method for generating a control scheme and device manufacturing method
ASML NETHERLANDS BV0 citations58
US11709434B2Jul 25, 2023
Device manufacturing method
ASML NETHERLANDS BV0 citations46
US12276919B2Apr 15, 2025
Method for controlling a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations44