Inventor

LIAO WENG-CHUNG

TW2 patents

Patents

2 patents

US7063939B2Jun 20, 2006

Method for high aspect ratio pattern transfer

UNIV NAT CHENG KUNG2 citations55

US7618574B2Nov 17, 2009

Imprint lithography utilizing silated acidic polymers

UNIV NAT CHENG KUNG0 citations44