Inventor

KIM BONGSEONG

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KIM BONGSEONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US9704690B2Jul 11, 2017

Plasma apparatus and method of operating the same

SAMSUNG ELECTRONICS CO LTD10 citations79

US10971333B2Apr 6, 2021

Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same

SAMSUNG ELECTRONICS CO LTD2 citations70

US12327709B2Jun 10, 2025

Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same

SAMSUNG ELECTRONICS CO LTD0 citations59

KIM MOOJIN

1 patent

US9490107B2Nov 8, 2016

Plasma apparatus and method of fabricating semiconductor device using the same

KIM MOOJIN55 citations89

TOKYO ELECTRON LTD

1 patent

US12347646B2Jul 1, 2025

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations51