Inventor
BIEGEN JAMES F
US7 patents
Patents
7 patentsUS4869593ASep 26, 1989
Interferometric surface profiler
ZYGO CORP128 citations96
US5390023AFeb 14, 1995
Interferometric method and apparatus to measure surface topography
ZYGO CORP95 citations94
US4948253AAug 14, 1990
Interferometric surface profiler for spherical surfaces
ZYGO CORP68 citations94
US4732483AMar 22, 1988
Interferometric surface profiler
ZYGO CORP91 citations94
US7751064B2Jul 6, 2010
Interference objective for annular test surfaces
ZYGO CORP8 citations83
US8045175B2Oct 25, 2011
Equal-path interferometer
ZYGO CORP14 citations80
US4820049AApr 11, 1989
Coating and method for testing plano and spherical wavefront producing optical surfaces and systems having a broad range of reflectivities
ZYGO CORP12 citations72