Inventor
UCHISAWA OSAMU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “UCHISAWA OSAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOYAMA ENG WORKS
7 patentsUS4828219AMay 9, 1989
Metal diaphragm valve
MOTOYAMA ENG WORKS108 citations95
US5516366AMay 14, 1996
Supply control system for semiconductor process gasses
MOTOYAMA ENG WORKS28 citations91
US6105933AAug 22, 2000
Diaphragm valve structure
MOTOYAMA ENG WORKS22 citations90
US5653419AAug 5, 1997
Diaphragm type high pressure shut-off valve
MOTOYAMA ENG WORKS40 citations90
US5524865AJun 11, 1996
Diaphragm valve structure
MOTOYAMA ENG WORKS45 citations90
US5551477ASep 3, 1996
Diaphragm-type flow control valve and manual control valve apparatus
MOTOYAMA ENG WORKS55 citations88
US6931203B2Aug 16, 2005
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD
MOTOYAMA ENG WORKS5 citations71
TOKYO ELECTRON LTD
4 patentsUS6134807AOct 24, 2000
Drying processing method and apparatus using same
TOKYO ELECTRON LTD557 citations98
US6167323ADec 26, 2000
Method and system for controlling gas system
TOKYO ELECTRON LTD23 citations92
US6157774ADec 5, 2000
Vapor generating method and apparatus using same
TOKYO ELECTRON LTD36 citations92
US6131307AOct 17, 2000
Method and device for controlling pressure and flow rate
TOKYO ELECTRON LTD23 citations92