Inventor
GUELER RICHARD
JP5 patents
⚠️ This page may combine multiple inventors who share the name “GUELER RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
4 patentsUS7010388B2Mar 7, 2006
Work-piece treatment system having load lock and buffer
AXCELIS TECH INC35 citations91
US7070661B2Jul 4, 2006
Uniform gas cushion wafer support
AXCELIS TECH INC18 citations82
US7026581B2Apr 11, 2006
Apparatus for positioning an elevator tube
AXCELIS TECH INC15 citations82
US7344352B2Mar 18, 2008
Workpiece transfer device
AXCELIS TECH INC4 citations59