Inventor
VAIDYA SHEILA
US13 patents
⚠️ This page may combine multiple inventors who share the name “VAIDYA SHEILA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AT & T BELL LAB
7 patentsUS5275896AJan 4, 1994
Single-alignment-level lithographic technique for achieving self-aligned features
AT & T BELL LAB72 citations95
US4992394AFeb 12, 1991
Self aligned registration marks for integrated circuit fabrication
AT & T BELL LAB32 citations92
US4555842ADec 3, 1985
Method of fabricating VLSI CMOS devices having complementary threshold voltages
AT & T BELL LAB49 citations92
US5338626AAug 16, 1994
Fabrication of phase-shifting lithographic masks
AT & T BELL LAB22 citations91
US5153083AOct 6, 1992
Method of making phase-shifting lithographic masks
AT & T BELL LAB26 citations91
US5320918AJun 14, 1994
Optical lithographical imaging system including optical transmission diffraction devices
AT & T BELL LAB25 citations90
US5358827AOct 25, 1994
Phase-shifting lithographic masks with improved resolution
AT & T BELL LAB15 citations72