Inventor
KRICK DAVID T
US3 patents
Patents
3 patentsUS5719085AFeb 17, 1998
Shallow trench isolation technique
INTEL CORP513 citations97
US5985735ANov 16, 1999
Trench isolation process using nitrogen preconditioning to reduce crystal defects
INTEL CORP49 citations93
US6118168ASep 12, 2000
Trench isolation process using nitrogen preconditioning to reduce crystal defects
INTEL CORP29 citations90