Inventor
SONG JAE-INH
KR6 patents
Patents
6 patentsUS5789360AAug 4, 1998
Cleaning solution for use on a semiconductor wafer following chemical-mechanical polishing of the wafer and method for using same
SAMSUNG ELECTRONICS CO LTD41 citations92
US6162671ADec 19, 2000
Method of forming capacitors having high dielectric constant material
SAMSUNG ELECTRONICS CO LTD25 citations91
US6092539AJul 25, 2000
In-situ cleaning apparatuses for wafers used in integrated circuit devices and methods of cleaning using the same
SAMSUNG ELECTRONICS CO LTD21 citations91
US6228739B1May 8, 2001
Pre-treatment method performed on a semiconductor structure before forming hemi-spherical grains of capacitor storage node
SAMSUNG ELECTRONICS CO LTD28 citations88
US6277204B1Aug 21, 2001
Methods for cleaning wafers used in integrated circuit devices
SAMSUNG ELECTRONICS CO LTD14 citations72
US6043206AMar 28, 2000
Solutions for cleaning integrated circuit substrates
SAMSUNG ELECTRONICS CO LTD13 citations72